Resist-Polymer-Matrix Effects on Nanometer Lithography.
نویسندگان
چکیده
منابع مشابه
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nanoscale science and technology has today mainly focused on the fabrication of nano devices. in this paper, we study the use of lithography process to build the desired nanostructures directly. nanolithography on polymethylmethacrylate (pmma) surface is carried out by using atomic force microscope (afm) equipped with silicon tip, in contact mode. the analysis of the results shows that the dept...
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ژورنال
عنوان ژورنال: Kobunshi
سال: 1995
ISSN: 0454-1138,2185-9825
DOI: 10.1295/kobunshi.44.242